PHASE CHANGE MEMORY STACK WITH TREATED SIDEWALLS

Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming the memory stack out of a plurality of elements. An adhesion species is formed on at least one sidewall of the memory stack wherein the adhesion species has a gradient structure that resul...

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Bibliographische Detailangaben
Hauptverfasser: McTeer, Everett Allen, Hu, Yongjun Jeff, Qin, Shu, Lengade, Swapnil, Chan, Tsz W
Format: Patent
Sprache:eng
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Zusammenfassung:Memory devices and methods for fabricating memory devices have been disclosed. One such method includes forming the memory stack out of a plurality of elements. An adhesion species is formed on at least one sidewall of the memory stack wherein the adhesion species has a gradient structure that results in the adhesion species intermixing with an element of the memory stack to terminate unsatisfied atomic bonds of the element. The gradient structure further comprises a film of the adhesion species on an outer surface of the at least one sidewall. A dielectric material is implanted into the film of the adhesion species to form a sidewall