IMAGE SENSOR HAVING CONDUCTIVE LAYER AND PROTECTIVE LAYER

An image sensor includes a substrate having a first region and a second region. The image sensor further includes a dielectric layer over the substrate. The image sensor further includes a conductive layer over the dielectric layer, wherein in the first region the conductive layer has a grid shape a...

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Bibliographische Detailangaben
Hauptverfasser:	TSAI, Jian-Shin, LIN, Chun-Chih, LEE, Chin-Szu, WU, Cheng-Yi, LIN, Yi-Ming, CHANG, Chao-Ching, CHEN, C. H, TSAI, Y. T, CHANG, Wen-Shan, LIN, Min-Hui
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	An image sensor includes a substrate having a first region and a second region. The image sensor further includes a dielectric layer over the substrate. The image sensor further includes a conductive layer over the dielectric layer, wherein in the first region the conductive layer has a grid shape and in the second region a portion of the conductive layer is concave toward the substrate. The image sensor further includes a protective layer, wherein the protective layer is over the conductive layer in the first region, and over a top surface and along sidewalls of the conductive layer in the second region.