ROTATIONAL SPEED SENSOR AND OPERATION OF A ROTATIONAL SPEED SENSOR AT VARIOUS FREQUENCIES AND IN VARIOUS DIRECTIONS

A rotation rate sensor having a substrate having a principal extension plane and having a structure movable with respect to the substrate. The rotation rate sensor encompasses a first excitation unit for deflecting the structure out of an idle position substantially parallel to a first axis extendin...

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Hauptverfasser: Kuhlmann, Burkhard, Lassl, Andreas, Balslink, Thorsten
Format: Patent
Sprache:eng
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Zusammenfassung:A rotation rate sensor having a substrate having a principal extension plane and having a structure movable with respect to the substrate. The rotation rate sensor encompasses a first excitation unit for deflecting the structure out of an idle position substantially parallel to a first axis extending parallel to the principal extension plane, in such a way that the structure is excitable to oscillate at a first frequency with a motion component substantially in a direction parallel to the first axis, the rotation rate sensor encompassing a second excitation unit for deflecting the structure out of an idle position substantially parallel to a second axis extending parallel to the principal extension plane and extending perpendicularly to the first axis, in such a way that the structure is excitable to oscillate at a second frequency with a motion component substantially in a direction parallel to the second axis.