THIN-FILM TRANSISTOR, THIN-FILM TRANSISTOR SUBSTRATE, AND LIQUID CRYSTAL DISPLAY DEVICE

A TFT in which a channel region is formed of an oxide semiconductor is provided. Threshold voltage shift due to holes photoexcited in the vicinity of a source electrode and a drain electrode is prevented so that reliability is enhanced. A lower semiconductor layer is partially provided between an ox...

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Bibliographische Detailangaben
Hauptverfasser: INOUE, Kazunori, HIRANO, Rii
Format: Patent
Sprache:eng
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Zusammenfassung:A TFT in which a channel region is formed of an oxide semiconductor is provided. Threshold voltage shift due to holes photoexcited in the vicinity of a source electrode and a drain electrode is prevented so that reliability is enhanced. A lower semiconductor layer is partially provided between an oxide semiconductor layer and a gate insulating film. The lower semiconductor layer is present in at least one of a source overlapping region where the oxide semiconductor layer overlaps a source electrode and a drain overlapping region where the oxide semiconductor layer overlaps a drain electrode. In contrast, a region where the lower semiconductor layer is absent is provided between the source overlapping region and the drain overlapping region.