IN-SITU THIN FILM BASED TEMPERATURE SENSING FOR HIGH TEMPERATURE UNIFORMITY AND HIGH RATE OF TEMPERATURE CHANGE THERMAL REFERENCE SOURCES

A thin-film device for generating a blackbody spectrum is disclosed. The device includes first layer configured to generate heat in response to an applied voltage and a second layer configured to generate the blackbody radiation spectrum in response to the heat from the first layer. A thermocouple i...

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Bibliographische Detailangaben
Hauptverfasser: Chow, James R, Townsend, Carl W, Ketola, Kurt S
Format: Patent
Sprache:eng
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Zusammenfassung:A thin-film device for generating a blackbody spectrum is disclosed. The device includes first layer configured to generate heat in response to an applied voltage and a second layer configured to generate the blackbody radiation spectrum in response to the heat from the first layer. A thermocouple is disposed between the first layer and the second layer for measuring a temperature at the second layer. The thermocouple measures temperature at the second layer in order to control temperature at the second layer. The thermocouple can be a copper-carbon nanotube thermocouple.