SYSTEMS AND METHODS TO DYNAMICALLY CONFIGURE DATA VALUES STORED ON A MASS FLOW CONTROLLER

The disclosed embodiments include systems and methods to dynamically configure data values stored on a mass flow controller (MFC). In one embodiment, the MFC includes an inlet for receiving fluid, a flow path, a mass flow sensor for providing a signal corresponding to mass flow of the fluid through...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ELLEC, Chris, BANARES, Berwin
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The disclosed embodiments include systems and methods to dynamically configure data values stored on a mass flow controller (MFC). In one embodiment, the MFC includes an inlet for receiving fluid, a flow path, a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path, and a valve for regulating a flow of the fluid out of an outlet of the MFC. The MFC also includes a storage medium having a fluid model of the fluid and a file system for configuring the fluid model. The MFC further includes a processor operable to perform operations including receiving instructions to configure the fluid model, obtaining MFC data indicative of a change to the fluid model, and utilizing the file system to dynamically update the fluid model with MFC data indicative of the change in the fluid model.