EXHAUST GAS TREATMENT APPARATUS

EXHAUST GAS TREATMENT APPARATUS

An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOMAI, Tetsuo, MIYAZAKI, Kazutomo, KASHIWAGI, Seiji
Format: Patent
Sprache:eng
Schlagworte:
BLASTING
COMBUSTION APPARATUS
COMBUSTION PROCESSES
CONSUMING WASTE PRODUCTS BY COMBUSTION
CREMATION FURNACES
HEATING
LIGHTING
MECHANICAL ENGINEERING
WEAPONS
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Beschreibung
Zusammenfassung:An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.