MAGNETIC FIELD SENSOR WITH MAGNETIC FIELD SHIELD STRUCTURE AND SYSTEMS INCORPORATING SAME

A system comprises at least one magnetic field sensor having a magnetic sense element formed on a substrate. The sense element senses a magnetic field along a sense axis oriented in a first direction parallel to a surface of the substrate. A shield structure is formed on the substrate. The shield st...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Marauska, Stephan, Matz, Harmut, Kock, Jörg, Isler, Mark, Helmboldt, Dennis
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A system comprises at least one magnetic field sensor having a magnetic sense element formed on a substrate. The sense element senses a magnetic field along a sense axis oriented in a first direction parallel to a surface of the substrate. A shield structure is formed on the substrate. The shield structure has first and second shield portions and the magnetic sense element is disposed between the shield portions. Each of the shield portions includes a body and first and second brim segments extending from opposing ends of the body. The body is aligned parallel to a second direction perpendicular to the first direction and parallel to the surface of the substrate. The brim segments are aligned substantially parallel to the first direction. The shield portions are arranged in mirror symmetry with the brim segments of each of the shield portions extending toward one another.