CANTILEVER AND MANUFACTURING METHOD FOR CANTILEVER

A cantilever used in a scanning probe microscope includes a supporting section, a lever section, and a protrusion section, which is a probe. A crystalline carbon composite layer including a crystalline carbon nanomaterial and a metal material, a melting point of which is 420° C. or lower, is deposit...

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Bibliographische Detailangaben
Hauptverfasser: BIN YAAKOB, Yazid, TANEMURA, Masaki, KITAZAWA, Masashi, VISHWAKARMA, Riteshkumar Ratneshkumar, WAKAMATSU, Yuji, BIN ROSMI, Mohamad Saufi
Format: Patent
Sprache:eng
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Zusammenfassung:A cantilever used in a scanning probe microscope includes a supporting section, a lever section, and a protrusion section, which is a probe. A crystalline carbon composite layer including a crystalline carbon nanomaterial and a metal material, a melting point of which is 420° C. or lower, is deposited on a distal end portion of the protrusion section.