WAVE INTERFERENCE SYSTEMS AND METHODS FOR MEASURING OBJECTS AND WAVES

A method of measuring an object is disclosed. In one step, a first interference pattern of interference waves is created. In another step, first measurement information is measured by measuring the scattering of the first interference pattern off the object, the transmission of the first interferenc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Durfee, Dallin S, Jackson, Jarom
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of measuring an object is disclosed. In one step, a first interference pattern of interference waves is created. In another step, first measurement information is measured by measuring the scattering of the first interference pattern off the object, the transmission of the first interference pattern through the object, or the transmission of the first interference pattern around the object. In yet another step, a second interference pattern of interfered waves is created having a different shape or different scale than the first interference pattern. In another step, second measurement information is measured by measuring the scattering of the second interference pattern off the object, the transmission of the second interference pattern through the object, or the transmission of the second interference pattern around the object. In still another step, measurements of the object are determined using knowledge about shape of the first and second interference patterns and the first and second measurement information.