PACKAGING STRUCTURE AND PACKAGING METHOD

PACKAGING STRUCTURE AND PACKAGING METHOD

A packaging structure and a packaging method are provided. The packaging structure includes: a chip unit, where a first surface of the chip unit includes a sensing region; and an upper cover plate structure, where a first surface of the upper cover plate structure is provided with a groove structure...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Hong, Fangyuan, Wang, Zhiqi
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A packaging structure and a packaging method are provided. The packaging structure includes: a chip unit, where a first surface of the chip unit includes a sensing region; and an upper cover plate structure, where a first surface of the upper cover plate structure is provided with a groove structure, the first surface of the chip unit is attached with the first surface of the upper cover plate structure, the sensing region is located within a cavity surrounded by the groove structure and the first surface of the chip unit, the upper cover plate structure further includes a second surface opposite to the first surface, and an area of the second surface of the upper cover plate structure is less than an area of the first surface of the upper cover plate structure.