BROAD BAND PLASMA INSPECTION BASED ON A NUISANCE MAP

BROAD BAND PLASMA INSPECTION BASED ON A NUISANCE MAP

A noise map is used for defect detection. One or more measurements of intensities at one or more pixels are received and an intensity statistic is determined for each measurement. The intensity statistics are grouped into at least one region and stored with at least one alignment target. A wafer can...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Perali, Pavan Kumar, Vemareddy, Kaushik Reddy, Suman, Shishir
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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Beschreibung
Zusammenfassung:A noise map is used for defect detection. One or more measurements of intensities at one or more pixels are received and an intensity statistic is determined for each measurement. The intensity statistics are grouped into at least one region and stored with at least one alignment target. A wafer can be inspected with a wafer inspection tool using the noise map. The noise map can be used as a segmentation mask to suppress noise.