SEMICONDUCTOR TRANSISTOR HAVING SUPERLATTICE STRUCTURES

A transistor, including a substrate of a first doping type; an epitaxy layer of the first doping type above the substrate; a channel layer of a second doping type, differing from the first doping type, above the epitaxy layer; a plurality of trenches in the channel layer, which have a gate electrode...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Banzhaf, Christian Tobias, Grieb, Michael, Jacke, Thomas, Rambach, Martin
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A transistor, including a substrate of a first doping type; an epitaxy layer of the first doping type above the substrate; a channel layer of a second doping type, differing from the first doping type, above the epitaxy layer; a plurality of trenches in the channel layer, which have a gate electrode situated below the trenches and are bordered by a source terminal of the first doping type above the channel layer; a plurality of shielding areas of the second doping type, which are situated below the gate electrode. The shielding areas are guided below the trenches together in a interconnection of shielding areas, and several shielding areas are jointly guided to terminals for contacting the shielding areas.