MEMS COMPONENT HAVING TWO DIFFERENT INTERNAL PRESSURES

A method for manufacturing a micromechanical component including a substrate and a cap which is joined to the substrate, and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Frey, Jens, Reinmuth, Jochen, Ametowobla, Mawuli, Graf, Eckhard, Breitling, Achim
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method for manufacturing a micromechanical component including a substrate and a cap which is joined to the substrate, and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. In a first step, an access opening connecting the first cavity to surroundings of the micromechanical component being formed in the substrate or in the cap. In a second step, the first pressure and/or the first chemical composition in the first cavity being set. In a third step, the access opening being sealed by introducing energy or heat into an absorbing portion of the substrate or the cap with the aid of a laser, a reversible getter for further setting the first pressure and/or the first chemical composition being introduced into the first cavity chronologically prior to the third step.