MEMS DEVICE
A MEMS (Micro-Electro-Mechanical System) device includes: a substrate, including an anchor; a proof mass, including a centroid, wherein there is a distance between the centroid and the anchor; at least two spring assemblies, connected between two opposite sides of the anchor and the proof mass, to a...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A MEMS (Micro-Electro-Mechanical System) device includes: a substrate, including an anchor; a proof mass, including a centroid, wherein there is a distance between the centroid and the anchor; at least two spring assemblies, connected between two opposite sides of the anchor and the proof mass, to assist a motion of the proof mass; and plural sensing capacitances, located between the substrate and the proof mass to operably sense the motion of the mass; wherein each of the spring assemblies includes a parallel-swing spring and a compression spring which are serially connected to each other. |
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