METHOD FOR MANUFACTURING MULTILAYER CERAMIC SUBSTRATE

A method of producing a multi-layer ceramic substrate includes the steps of: (A) preparing a first ceramic green sheet with a thermal expansion layer arranged thereon, and at least one second ceramic green sheet with no thermal expansion layer arranged thereon; (B) laminating the first and second ce...

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Bibliographische Detailangaben
Hauptverfasser:	IKEDA, Hatsuo, MASUKAWA, Junichi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A method of producing a multi-layer ceramic substrate includes the steps of: (A) preparing a first ceramic green sheet with a thermal expansion layer arranged thereon, and at least one second ceramic green sheet with no thermal expansion layer arranged thereon; (B) laminating the first and second ceramic green sheets with the thermal expansion layer sandwiched therebetween, thereby obtaining a green sheet laminate; (C) pressure-bonding together the ceramic green sheets of the green sheet laminate; (D) heating and thereby expanding the thermal expansion layer in the pressure-bonded green sheet laminate; (E) extracting a portion of the green sheet laminate that has been displaced the expansion of the thermal expansion layer, thereby forming a cavity in the green sheet laminate; and (F) sintering the green sheet laminate with the cavity formed therein.