MEASURING HEAD

A measuring head includes a first slide mechanism for a first measurement axis provided to be detachable to external moving devices; a second slide mechanism for a second measurement axis held to be movable by the first slide mechanism; a third slide mechanism for a third measurement axis held to be...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUMIYA, Sadayuki, KAMIYAMA, Shuichi, MIYAZAKI, Tomoyuki, ARAI, Hideyuki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A measuring head includes a first slide mechanism for a first measurement axis provided to be detachable to external moving devices; a second slide mechanism for a second measurement axis held to be movable by the first slide mechanism; a third slide mechanism for a third measurement axis held to be movable by the second slide mechanism; a probe held to be movable by the third slide mechanism; pneumatic cylinders for connecting slider parts and guide parts included in each slide mechanism; and automatic pressure regulators for respectively changing air pressures supplied to each pneumatic cylinder in accordance with measurement postures of the measuring head.