Linked micromechanical positioning apparatus for real-time testing and measurement

The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coup...

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Bibliographische Detailangaben
Hauptverfasser:	VIMPARI, Markku, VÄHÄSÖYRINKI, Mikko
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES HAND TOOLS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANIPULATORS MEASURING MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PORTABLE POWER-DRIVEN TOOLS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	The invention relates to a positioning device (120, 154), for example for testing, comprising a micromechanical positioning actuator (130) for causing movement of a probe (150, 151) with respect to a target (110), a positioning controller (145), the positioning controller (145) having an output coupled to the actuator (130) for controlling the movement, and the positioning controller (145) having a steering input (156) for receiving a steering signal to the positioning controller (145), and the positioning controller (145) arranged to control the movement based on the steering signal. The measurement device may have memory for storing positioning control instructions (300). The positioning controller (145) may be arranged to control said movement based on said steering signal and said positioning control instructions (300).