MEASUREMENT DEVICE, PROCESSING DEVICE, AND ARTICLE MANUFACTURING METHOD

A measurement device for measuring a position of an object, includes an illuminator configured to illuminate the object, an image capturing device configured to capture the object illuminated by the illuminator, a calculator configured to obtain the position of the object based on an image obtained...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Yanagisawa, Michio, Uchida, Ippei
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A measurement device for measuring a position of an object, includes an illuminator configured to illuminate the object, an image capturing device configured to capture the object illuminated by the illuminator, a calculator configured to obtain the position of the object based on an image obtained by the image capturing device, and a controller configured to control the illuminator and the image capturing unit. The controller outputs timing information indicating a timing determined in accordance with a measurement period that is an overlapping period of an illumination period for causing the illuminator to illuminate the object and an image capturing period for causing the image capturing device to capture the object.