MEMS DEVICE FOR GENERATING AN ION BEAM

A generator of an ion beam is provided, including an ionisation chamber provided with an inlet of a fluid to be ionised; a source of ionising particles configured to impact the fluid in an impact zone of the ionisation chamber so as to generate ions; and an extractor of ions generated in a direction of an outlet zone of the generator, the extractor including at least two electrodes, a first electrode referred to as input electrode laterally bordering the impact zone, and at least one second electrode referred to as intermediate electrode located in the impact zone, the at least two electrodes being configured to generate a voltage gradient in the impact zone, with the voltage gradient being configured to direct the generated ions to the outlet zone of the generator.