METHOD OF MANUFACTURING OXIDATION LAYER FOR SOLAR CELL

A method of manufacturing an oxidation layer for a solar cell is disclosed. The method includes exposing a substrate to a wet oxidation atmosphere and forming an oxidation layer on the substrate by maintaining a concentration of an oxidizing agent in the wet oxidation atmosphere for a process time.

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Bibliographische Detailangaben
Hauptverfasser:	KIM, Hyunjin, CHOI, Bokyeom, GONG, Daeyeong
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A method of manufacturing an oxidation layer for a solar cell is disclosed. The method includes exposing a substrate to a wet oxidation atmosphere and forming an oxidation layer on the substrate by maintaining a concentration of an oxidizing agent in the wet oxidation atmosphere for a process time.