YTTRIUM OXYFLUORIDE, STARTING MATERIAL POWDER FOR PRODUCTION OF STABILIZED YTTRIUM OXYFLUORIDE, AND METHOD FOR PRODUCING STABILIZED YTTRIUM OXYFLUORIDE
An yttrium oxyfluoride is represented by YOF and is stabilized by a fluoride represented by CaF2. Preferably, the number of moles of Ca with respect to 100 mol of yttrium is from 8 to 40 mol. A powder material is made of a first powder mixture including a calcium fluoride powder represented by CaF2...
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Zusammenfassung: | An yttrium oxyfluoride is represented by YOF and is stabilized by a fluoride represented by CaF2. Preferably, the number of moles of Ca with respect to 100 mol of yttrium is from 8 to 40 mol. A powder material is made of a first powder mixture including a calcium fluoride powder represented by CaF2 and an yttrium oxyfluoride powder represented by YOF, or a second powder mixture including a calcium fluoride powder represented by CaF2, an yttrium fluoride powder represented by YF3, and an yttrium oxide powder represented by Y2O3. A production method involves firing a molded product of the first or second powder mixture under predetermined conditions. |
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