APPARATUSES INCLUDING BURIED DIGIT LINES

Methods of forming semiconductor device structures include forming trenches in an array region and in a buried digit line end region, forming a metal material in the trenches, filling the trenches with a mask material, removing mask the mask material in the trenches to expose a portion of the metal...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Surthi, Shyam, Mathew, Suraj
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Methods of forming semiconductor device structures include forming trenches in an array region and in a buried digit line end region, forming a metal material in the trenches, filling the trenches with a mask material, removing mask the mask material in the trenches to expose a portion of the metal material, and removing the exposed portion of the metal material. A plurality of conductive contacts is formed in direct contact with the metal material in the buried digit line end region. Methods of forming a buried digit line contact include forming conductive contacts physically contacting metal material in trenches in a buried digit line end region. Vertical memory devices and apparatuses include metallic connections disposed between a buried digit line and a conductive contact in a buried digit line end region.