SEMICONDUCTOR TREATMENT COMPOSITION AND TREATMENT METHOD

A semiconductor treatment composition includes potassium, sodium, and a compound A represented by the formula (1), and has a potassium content MK (ppm) and a sodium content MNa (ppm) that satisfy MK/MNa=1×10−1 to 1×104.

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Bibliographische Detailangaben
Hauptverfasser:	SHINODA, Tomotaka, HAYAMA, Takahiro, KAMEI, Yasutaka, NISHIGUCHI, Naoki, KAMO, Satoshi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A semiconductor treatment composition includes potassium, sodium, and a compound A represented by the formula (1), and has a potassium content MK (ppm) and a sodium content MNa (ppm) that satisfy MK/MNa=1×10−1 to 1×104.