Dual PVD Chamber And Hybrid PVD-CVD Chambers

Dual PVD Chamber And Hybrid PVD-CVD Chambers

Processing platforms comprising a central transfer station having at least one robot and a dual chamber processing chamber connected to a side of the central transfer station through a gate valve are described. The dual chamber processing chamber comprises a first processing volume and a second proc...

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Bibliographische Detailangaben
Hauptverfasser: Yadamane, Sandesh, Ravi, Jallepally, Purathe, Vinod Konda, Jadhav, Deepak, Koppa, Manjunatha
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Zusammenfassung:Processing platforms comprising a central transfer station having at least one robot and a dual chamber processing chamber connected to a side of the central transfer station through a gate valve are described. The dual chamber processing chamber comprises a first processing volume and a second processing volume connected to a shared vacuum pump.