PRODUCT QUALITY PREDICTION METHOD FOR MASS CUSTOMIZATION

A product quality prediction method for mass customization is provided. When a production system has a status change, data of sets of process parameters and actual measurement values of workpiece samples processed before the status change occurs, and data of sets of process parameters and actual mea...

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Bibliographische Detailangaben
Hauptverfasser:	CHEN, Chun-Fang, TIENG, Hao, CHENG, Fan-Tien, YANG, Haw-Ching
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A product quality prediction method for mass customization is provided. When a production system has a status change, data of sets of process parameters and actual measurement values of workpiece samples processed before the status change occurs, and data of sets of process parameters and actual measurement values of few workpiece samples processed after the status change occurs are used for build or retrain a prediction model, thereby predicting a metrology value of a next workpiece.