STATIC ELIMINATOR AND STATIC ELIMINATING METHOD

A static eliminator performs processing of reducing the charge amount of an electrically charged substrate. The static eliminator includes a substrate holder and an ultraviolet irradiator. The substrate holder holds the substrate. The ultraviolet irradiator is capable of irradiating a main surface o...

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Bibliographische Detailangaben
Hauptverfasser:	ANO, Seiji, TANAKA, Takayoshi
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CORONA DEVICES ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES NATURALLY-OCCURRING ELECTRICITY OVERVOLTAGE ARRESTERS USING SPARK GAPS SPARK GAPS SPARKING PLUGS STATIC ELECTRICITY
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Beschreibung
Zusammenfassung:	A static eliminator performs processing of reducing the charge amount of an electrically charged substrate. The static eliminator includes a substrate holder and an ultraviolet irradiator. The substrate holder holds the substrate. The ultraviolet irradiator is capable of irradiating a main surface of the substrate with ultraviolet light in an irradiation amount that differs between a plurality of divided regions of the main surface of the substrate.