Inspection Substrate and an Inspection Method

An inspection substrate for inspecting a component, such as a liquid confinement system, of an apparatus for processing production substrates is discussed. The inspection substrate includes a body having dimensions similar to a production substrate so that the inspection substrate is compatible with...

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Bibliographische Detailangaben
Hauptverfasser:	VAN SOMMEREN, Daan Daniel Johannes Antonius, RAAYMAKERS, Jeroen Arnoldus Leonardus Johanne, YU, Miao, KEUKENS, Floor Lodewijk, RAS, Arnoldus Johannes Martinus Jozeph, BUDDENBERG, Harold Sebastiaan, EUMMELEN, Erik Henricus Egidius Catharina, MIGCHELBRINK, Ferdy, TANASA, Gheorghe, ARTS, Petrus Martinus Gerardus Johannes, GATTOBIGIO, Giovanni Luca, WOUTERS, Marijn, VAN DE WINKEL, Jimmy Matheus Wilhelmus, SAEED, Seerwan
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	An inspection substrate for inspecting a component, such as a liquid confinement system, of an apparatus for processing production substrates is discussed. The inspection substrate includes a body having dimensions similar to a production substrate so that the inspection substrate is compatible with the apparatus, an illumination device, such as light emitting diodes, embedded in the body, a sensor, such as an imaging device or a pressure sensor, that is embedded in the body and configured to generate inspection information, such as image data, relating to a parameter of the component of the apparatus proximate to the inspection substrate, and a storage device embedded in the body and configured to store the inspection information.