THIN-FILM CAPACITOR MANUFACTURING METHOD, INTEGRATED CIRCUIT MOUNTING SUBSTRATE, AND SEMICONDUCTOR DEVICE EQUIPPED WITH THE SUBSTRATE

A method for manufacturing a thin-film capacitor in a circuit substrate includes: forming, on a dielectric film formed on a surface of a support member, a first electrode layer of the thin-film capacitor; forming, on the dielectric film and the first electrode layer, an insulating base material of t...

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Bibliographische Detailangaben
1. Verfasser: HATTORI, Atsunori
Format: Patent
Sprache:eng
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