MANUFACTURING METHOD OF GALLIUM NITRIDE SUBSTRATE

MANUFACTURING METHOD OF GALLIUM NITRIDE SUBSTRATE

A method of manufacturing a gallium nitride substrate, the method including forming a first buffer layer on a silicon substrate such that the first buffer layer has one or more holes therein; forming a second buffer layer on the first buffer layer such that the second buffer layer has one or more ho...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM, Mi Hyun, TAK, Young Jo, KANG, Sam Mook, KIM, Jun Youn
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method of manufacturing a gallium nitride substrate, the method including forming a first buffer layer on a silicon substrate such that the first buffer layer has one or more holes therein; forming a second buffer layer on the first buffer layer such that the second buffer layer has one or more holes therein; and forming a GaN layer on the second buffer layer, wherein the one or more holes of the first buffer layer are filled by the second buffer layer.