SUBSTRATE PROCESSING APPARATUS AND METHOD

Disclosed are a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes an emissivity setting unit to which emissivity at a liquid chemical which is brought into contact with a substrate or emissivity at an interface at which the substrate and th...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	JUNG, Kwang Il, LEE, Byeong Su, RYU, Joo Hyung
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS COLORIMETRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING PHYSICS RADIATION PYROMETRY SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Disclosed are a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes an emissivity setting unit to which emissivity at a liquid chemical which is brought into contact with a substrate or emissivity at an interface at which the substrate and the liquid chemical are in contact with each other is input, a radiant energy input unit to which radiant energy radiating from the liquid chemical or the interface is input, and a calculation unit that calculates a calculation temperature of the liquid chemical or the interface based on the emissivity and the radiant energy.