THREE-DIMENSIONAL SHAPE MEASUREMENT APPARATUS

A three-dimensional shape measurement apparatus includes main pattern illumination parts, main image-capturing parts and a control part. The main pattern illumination parts obliquely illuminate grating pattern light in different directions toward a measurement target. The main image-capturing parts obtain a grating pattern image of the measurement target by receiving reflection light of the grating pattern light illuminated from the main pattern illumination parts and obliquely reflected by the measurement target. The control part produces height data of the measurement target using grating pattern images of the measurement target, or produces height data of the measurement target using image positions of plane images for the measurement target and texture information of the measurement target. The control part employs a grating pattern illuminated on the measurement target as the texture information to produce height data of the measurement target. Thus, a three-dimensional shape may be measured more easily and accurately.