ELECTROSTATIC CHUCKING FORCE MEASUREMENT TOOL FOR PROCESS CHAMBER CARRIERS

ELECTROSTATIC CHUCKING FORCE MEASUREMENT TOOL FOR PROCESS CHAMBER CARRIERS

An electrostatic chucking force tool is described that may be used on workpiece carriers for micromechanical and semiconductor processing. One example includes a workpiece fitting to hold a workpiece when gripped by an electrostatic chucking force by an electrostatic chuck, an arm coupled to the wor...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Pisharody, Gautam, Ramaswami, Seshadri, Kumar, Niranjan, Nemani, Srinivas D, Roy, Shambhu N
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:An electrostatic chucking force tool is described that may be used on workpiece carriers for micromechanical and semiconductor processing. One example includes a workpiece fitting to hold a workpiece when gripped by an electrostatic chucking force by an electrostatic chuck, an arm coupled to the workpiece fitting to pull the workpiece through the workpiece fitting laterally across the chuck, and a force gauge coupled to the arm to measure an amount of force with which the workpiece fitting is pulled by the arm in order to move the workpiece.