FORCE DETECTION SENSOR, FORCE SENSOR, TORQUE SENSOR, AND ROBOT

A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is diff...

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Bibliographische Detailangaben
1. Verfasser:	KAMIYA, Toshiyuki
Format:	Patent
Sprache:	eng
Schlagworte:	CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRICITY HAND TOOLS MANIPULATORS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PERFORMING OPERATIONS PHYSICS PORTABLE POWER-DRIVEN TOOLS TESTING TRANSPORTING WEIGHING
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Beschreibung
Zusammenfassung:	A force detection sensor includes a base member having a first surface subjected to an external force and a second surface having a normal direction different from the first surface, and electrode fingers placed on the second surface, wherein an arrangement direction of the electrode fingers is different from the normal direction of the first surface in a plan view of the second surface. Further, the second surface includes a surface of a piezoelectric material. A constituent material of the piezoelectric material is quartz crystal. The first surface crosses an electrical axis of the quartz crystal.