ABNORMALITY DETECTION APPARATUS

Disclosed is an abnormality detection apparatus including: a collection unit that collects state information indicating a state of each part of a semiconductor manufacturing apparatus in a predetermined cycle; a storage unit that stores the state information collected by the collection unit as a log...

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Bibliographische Detailangaben
Hauptverfasser:	Koyama, Noriaki, Shoji, Kazushi, Miyazaki, Motokatsu
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	Disclosed is an abnormality detection apparatus including: a collection unit that collects state information indicating a state of each part of a semiconductor manufacturing apparatus in a predetermined cycle; a storage unit that stores the state information collected by the collection unit as a log for each predetermined unit; an arithmetic unit that generates a monitoring band for monitoring the state of each part of the semiconductor manufacturing apparatus, based on the log; and a determination unit that determines whether the state of each part of the semiconductor manufacturing apparatus is abnormal, based on the state information and the monitoring band.