SUBSTRATE STOCKER AND SYSTEMS MANAGEMENT SOFTWARE

The invention described relates generally to manufacturing management software and more specifically to substrate manufacturing management software. In one example embodiment, to methods, apparatus, and systems which provides for a software or management of substrates, substrate carriers, stockers a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Wohanka, Christian, Fenner, Yves, Fiddes, John, Dovids, Gerhard, Rahrbach, Bernd
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention described relates generally to manufacturing management software and more specifically to substrate manufacturing management software. In one example embodiment, to methods, apparatus, and systems which provides for a software or management of substrates, substrate carriers, stockers and associated and other relates devices systems and methods such that improved efficiency can be realized in production, manufacturing and processing.