CONTROL SYSTEM, AND CONTROL METHOD AND PROGRAM FOR CONTROL SYSTEM

A PLC system includes a displacement sensor, drives, and a PLC. When an unmeasurable condition is detected at a data obtaining position, the PLC system moves the displacement sensor back to the position at which the unmeasurable condition is detected, and again performs measurement. When an unmeasur...

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Bibliographische Detailangaben
1. Verfasser:	SAWARAGI, Hiroshi
Format:	Patent
Sprache:	eng
Schlagworte:	CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS REGULATING
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Beschreibung
Zusammenfassung:	A PLC system includes a displacement sensor, drives, and a PLC. When an unmeasurable condition is detected at a data obtaining position, the PLC system moves the displacement sensor back to the position at which the unmeasurable condition is detected, and again performs measurement. When an unmeasurable condition is detected again in the measurement, the PLC system SYS moves the stage to the next data obtaining position, and again performs measurement.