ELECTRONIC COMPONENT, ELECTRONIC COMPONENT MANUFACTURING APPARATUS, AND ELECTRONIC COMPONENT MANUFACTURING METHOD

An electronic component, an electronic component manufacturing apparatus, and an electronic component manufacturing method are provided which enable an electromagnetic wave shielding film formed on a package to achieve an excellent shielding characteristic. An electronic component 10 includes an ele...

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Bibliographische Detailangaben
Hauptverfasser: KAMO, Yoshinao, FUJITA, Atsushi, MATSUNAKA, Shigeki, ITO, Akihiko
Format: Patent
Sprache:eng
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Zusammenfassung:An electronic component, an electronic component manufacturing apparatus, and an electronic component manufacturing method are provided which enable an electromagnetic wave shielding film formed on a package to achieve an excellent shielding characteristic. An electronic component 10 includes an electromagnetic wave shielding film 13 formed on the top face of a package sealing elements. The thickness of the electromagnetic wave shielding film 13 on the top face of the package 12 is 0.5 to 9 μm, and the relationship between the average height Rc of the roughness curvature factor of the top face of the package 12 and the thickness Te of the electromagnetic wave shielding film 13 is Rc≤2Te.