NOZZLE AND ETCHING APPARATUS

A nozzle for use in an etching apparatus and an etching apparatus including the nozzle are provided. The nozzle includes: a hollowed main body having a connector at one end thereof and a main-body outlet at the other end thereof, a main-body connection part being provided at an outer wall of the mai...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ZI, Yubao, HUANG, Eryuan, LIU, Zuhong, DING, Xilong, WU, Zhaozeng, WANG, Chengsheng
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY NOZZLES PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	A nozzle for use in an etching apparatus and an etching apparatus including the nozzle are provided. The nozzle includes: a hollowed main body having a connector at one end thereof and a main-body outlet at the other end thereof, a main-body connection part being provided at an outer wall of the main body, said one end of the main body being connected with a pipe via the connector and a nozzle sleeve including a nozzle-sleeve connection part and a nozzle-sleeve outlet, the nozzle sleeve being connected to an outer side of said the other end of the main body having the main-body outlet through the nozzle-sleeve connection part and the main-body connection part and the nozzle sleeve is movable relative to the main body in an outflow direction of the main body.