METHOD AND APPARATUS FOR INSPECTION AND METROLOGY

A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a su...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SIMONS Hubertus Johannes Gertrudus, WILDENBERG Jochem Sebastiaan, TEN BERGE Peter, MOS Everhardus Cornelis, KUBIS Michael, WALLERBOS Erik Johannes Maria, IGNATOVA Velislava, JENSEN Erik
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method including evaluating, with respect to a parameter representing remaining uncertainty of a mathematical model fitting measured data, one or more mathematical models for fitting measured data and one or more measurement sampling schemes for measuring data, against measurement data across a substrate, and identifying one or more mathematical models and/or one or more measurement sampling schemes, for which the parameter crosses a threshold.