SILICON-CONTAINING UNDERLAYERS
Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si-O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Wet-strippable underlayer compositions comprising one or more silicon-containing polymers comprising a backbone comprising Si-O linkages, one or more organic blend polymers, and a cure catalyst are provided. These compositions are useful in the manufacture of various electronic devices. |
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