OFFLINE VISION ASSIST METHOD AND APPARATUS FOR INTEGRATED CIRCUIT DEVICE VISION ALIGNMENT

An offline vision assisted calibration system includes: a bottom side socket assembly that is mountable in an integrated circuit device handler and comprises: a socket plate that comprises a hole grid array; and a top contactor assembly that is mountable in an integrated circuit device handler and c...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Ding Kexiang Ken, Laver Michael Anthony
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An offline vision assisted calibration system includes: a bottom side socket assembly that is mountable in an integrated circuit device handler and comprises: a socket plate that comprises a hole grid array; and a top contactor assembly that is mountable in an integrated circuit device handler and comprises: a guide plate, a plurality of fiducials located on a lower side surface of the guide plate, a contact holder plate comprising a top contactor contact array, and a plurality of adjustment actuators configured to move the contact holder plate with respect to the guide plate; and a calibration jig comprising an array of contacts on a bottom side thereof, wherein the calibration jig is configured to be placed in the socket plate such that the contacts engage with the hole grid array of the socket plate.