MEMS SWITCH

Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Fitzgerald Padraig, Schirmer Mark, Wong Jo-ey, Stenson Bernard Patrick, Lambkin Paul, Goggin Raymond C
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Several features are disclosed that improve the operating performance of MEMS switches such that they exhibit improved in-service life and better control over switching on and off.