OBSERVATION SYSTEM AND OBSERVATION METHOD

An observation system includes: a plurality of imaging sections to image one or more samples; a plurality of driving mechanisms that respectively move the imaging sections to change an imaging position for the samples; and a control circuit that controls operations of the driving mechanisms and the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUOTO Hideaki, NONAKA Osamu
Format: Patent
Sprache:eng
Schlagworte:
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