OBSERVATION SYSTEM AND OBSERVATION METHOD

An observation system includes: a plurality of imaging sections to image one or more samples; a plurality of driving mechanisms that respectively move the imaging sections to change an imaging position for the samples; and a control circuit that controls operations of the driving mechanisms and the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUOTO Hideaki, NONAKA Osamu
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An observation system includes: a plurality of imaging sections to image one or more samples; a plurality of driving mechanisms that respectively move the imaging sections to change an imaging position for the samples; and a control circuit that controls operations of the driving mechanisms and the imaging sections to cause the imaging sections to image the samples, while causing the driving mechanisms to respectively move the imaging sections. The control circuit imposes different limitations on movement patterns of the imaging sections depending on a characteristic of the samples.