QUARTZ CRYSTAL MICROBALANCE SENSOR FOR DEPOSITION MONITORING

A quartz crystal microbalance (QCM) sensor includes a crystal plate, a buffer layer, and an electrode. The crystal plate has a first surface and a second surface. The second surface is opposite the first surface. The buffer layer includes a first buffer layer and a second buffer layer. The first buf...

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Bibliographische Detailangaben
Hauptverfasser:	HA Mokleem, JO Yongho
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A quartz crystal microbalance (QCM) sensor includes a crystal plate, a buffer layer, and an electrode. The crystal plate has a first surface and a second surface. The second surface is opposite the first surface. The buffer layer includes a first buffer layer and a second buffer layer. The first buffer layer is disposed on the first surface of the crystal plate. the second buffer layer is disposed on the second surface of the crystal plate. The electrode includes a first electrode and a second electrode. The first electrode is disposed on the first buffer layer. The second electrode is disposed on the second buffer layer. The electrode includes at least one of titanium, scandium, beryllium, cobalt, yttrium, zirconium, technetium, ruthenium, lanthanum, cerium, praseodymium, neodymium, gadolinium, terbium, dysprosium, holmium, erbium, thulium, lutetium, hafnium, rhenium, osmium, americium, curium, berkelium, and californium.