Semiconductor Device Having a Trench Gate Electrode
A semiconductor device includes a semiconductor substrate comprising a main surface and a gate electrode in a trench between neighboring semiconductor mesas, The gate electrode is electrically insulated from the neighboring semiconductor mesas by a dielectric layer. The semiconductor device further...
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Sprache: | eng |
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Zusammenfassung: | A semiconductor device includes a semiconductor substrate comprising a main surface and a gate electrode in a trench between neighboring semiconductor mesas, The gate electrode is electrically insulated from the neighboring semiconductor mesas by a dielectric layer. The semiconductor device further includes a conductor arranged, at least partially, between neighboring dielectric contact spacers. The conductor has a conductivity greater than a conductivity of the gate electrode, An interface between the conductor and the gate electrode extends along the gate electrode. |
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