SEMICONDUCTOR TREATMENT COMPOSITION AND TREATMENT METHOD

SEMICONDUCTOR TREATMENT COMPOSITION AND TREATMENT METHOD

A semiconductor treatment composition includes particles having a particle size of 0.1 to 0.3 micrometers in a number of 3×101 to 1.5×103 per mL.

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Bibliographische Detailangaben
Hauptverfasser: Kamei Yasutaka, Shinoda Tomotaka, Hayama Takahiro, Kamo Satoshi, Nishiguchi Naoki
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor treatment composition includes particles having a particle size of 0.1 to 0.3 micrometers in a number of 3×101 to 1.5×103 per mL.