IN-PLANE OVERTRAVEL STOPS FOR MEMS MICROPHONE

MEMS microphones and MEMS devices. In one embodiment, the MEMS microphone includes a membrane and a layer. The membrane is coupled to a support. The layer includes a backplate and an overtravel stop. The backplate is coupled to the support. The overtravel stop is coupled to the membrane and is physi...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Doller Andrew J, Guo Zhijun
Format:	Patent
Sprache:	eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PUBLIC ADDRESS SYSTEMS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	MEMS microphones and MEMS devices. In one embodiment, the MEMS microphone includes a membrane and a layer. The membrane is coupled to a support. The layer includes a backplate and an overtravel stop. The backplate is coupled to the support. The overtravel stop is coupled to the membrane and is physically separated from the backplate by a gap in a radial direction. The overtravel stop has a first end that is oriented proximal to the membrane and a second end that is oriented distal to the membrane. The second end flares outward to restrict movement of the membrane in the radial direction by contacting the backplate.