OBSERVATION APPARATUS, MEASUREMENT SYSTEM AND OBSERVATION METHOD

An observation apparatus includes an imaging unit, a driving mechanism, an operation circuit and a control circuit. The imaging unit generates image data by imaging a target object. The driving mechanism moves the imaging unit to change an imaging position of the target object. The operation circuit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KATO Shigeru, NONAKA Osamu, YAJI Tsuyoshi
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY HANDLING RECORD CARRIERS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS
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